355 nm UV · 532 nm Green · ns & ps

UV & Green Laser Systems

Cold-processing UV and green laser platforms for FPC/PCB depaneling, cover-film opening, ceramic drilling, fingerprint chip singulation and other thin-film precision jobs.

01

MS1030P / MS1040P / MS1050P (MicroScan MS Series)

Entry-format UV / green depaneling — from 300 × 350 mm

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MS1030P / MS1040P / MS1050P (MicroScan MS Series)

Compact UV / green laser cutting platforms for FPC, PCB, cover film, PI, FR4 and sensor packaging. Compatible with UV-ns, green-ns, UV-ps and green-ps sources for a broad process window.

Applications
  • FPC / PCB external cutting and drilling
  • Cover-film and electromagnetic-film window opening
  • Sony adhesive, PI, FR4, TF-card depaneling
  • Fingerprint chip singulation, camera module cutting
  • Multi-layer rigid-flex cover opening, QR marking
Key advantages
  • 0.2 µm resolution, ± 0.002 mm linear accuracy
  • Cutting speed up to 5000 mm/s
  • 5 MP CCD auto-alignment · auto-scaling compensation
  • ScanCutPro control software (proprietary)
  • Fully enclosed light path with fume extraction
Technical specification
ParameterMS1030PMS1040PMS1050P
Cutting range300 × 350 mm400 × 500 mm500 × 600 mm
Laser sourceUV / green ns or ps compatible
Resolution0.2 µm0.2 µm0.2 µm
Linear accuracy± 0.002 mm± 0.002 mm± 0.002 mm
Repeat accuracy± 0.002 mm± 0.002 mm± 0.002 mm
Machine accuracy± 0.005 mm± 0.005 mm± 0.005 mm
Motion speed≤ 1000 mm/s≤ 1000 mm/s≤ 1000 mm/s
Cutting speed500–5000 mm/s500–5000 mm/s500–5000 mm/s
Spot size≤ 0.02 mm≤ 0.02 mm≤ 0.02 mm
Cutting thickness≤ 1 mm≤ 1 mm≤ 1 mm
Weight800 kg1100 kg1500 kg
02

MicroScan 5000D / 5000P

Dual-head, dual-platform depaneling for volume FPC

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MicroScan 5000D / 5000P

Purpose-built for FPC and PCB volume production. Dual-platform, single- or dual-head configurations enable simultaneous cutting on two stations with ± 25 µm process accuracy and CPK 1.33.

Applications
  • FPC single- and double-sided depaneling
  • PCB / FR4 external cutting
  • Cover-film precision windowing
  • Camera module singulation
Key advantages
  • Dual-platform switching for zero idle time
  • Large 600 × 600 mm format available
  • International-brand UV / green ps or ns source
  • Ironless linear motor motion for micron accuracy
  • CCD auto-alignment · auto scaling · MES-compatible output
  • DataMatrix / QR code cutting support
Configurations
A. Dual-platform (single head)B. Dual-platform (dual head)C. Single platform (dual-head beam splitting)
Technical specification
ParameterMicroScan 5000D / 5000P
External dims1500 × 1600 × 1800 mm ± 20 mm
Weight2200 kg
Power3∅ 5-wire AC 380 V / 63 A
Working area350 × 500 mm (dual) / 650 × 520 mm (single)
Single laserUV/green ns or ps · 15–60 W
Dual laserUV/green ns · 15–35 W
Spot sizeUV 20 ± 5 µm · Green 25 ± 5 µm
Cutting speed1000–2000 mm/s standard · 500–1000 mm/s double-sided FPC
Min hole0.3 mm
Process accuracy± 25 µm · CPK ≥ 1.33
X-Y accuracy± 5 µm
Repeat alignment± 2 µm
03

MicroScan 6000PII

Gantry + fly-optics — in-line ready

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MicroScan 6000PII

Gantry-structure single-platform machine designed to plug into automated FPC/PCB lines with dedicated loading/unloading. Cutting sections, layer-selective depaneling and area-selective cutting all in one pass.

Applications
  • In-line FPC / PCB external cutting and drilling
  • Cover-film window opening
  • Fingerprint chip and TF-card singulation
  • Camera module cutting, QR marking
Key advantages
  • Gantry structure + fly-optics for line integration
  • Sectional / layered / region-selective cutting in one setup
  • High-resolution branded CCD for auto-alignment and focus
  • Vision model capture for arbitrary feature points
  • Fume extraction system for operator safety
Configurations
A. Single platform B. Dual stationC. Roll-to-sheet D. Rail interface
Technical specification
ParameterMicroScan 6000PII
External dims1150 × 1600 × 1800 mm ± 20 mm
Weight1500 kg
Working area460 × 520 mm
Cutting speed1000–2000 mm/s cover-film · 500–1000 mm/s double-sided FPC
Min hole0.3 mm
Process accuracy± 25 µm · CPK ≥ 1.33
04

Copper-Foil UV Micro-Drilling Machine

300 holes/sec @ 100 µm for FPC copper foil

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Copper-Foil UV Micro-Drilling Machine

Roll-to-sheet or sheet-to-sheet copper-foil drilling platform using 20 W UV laser for 50 µm minimum holes at 300 holes/second per 100 µm aperture.

Applications
  • FPC copper-foil micro-drilling
  • High-density interconnect via generation
  • Precision shim and connector prep
Key advantages
  • 50 µm minimum hole diameter
  • ± 20 µm process accuracy · CPK ≥ 1.67
  • ± 2 µm repeat alignment
  • Fully-automatic reel-to-sheet feeding option
  • Closed-loop first-brand power meter monitoring
Technical specification
ParameterCopper-Foil UV Micro-Drilling Machine
Working area270 × 500 mm
Reel width≤ 250 mm · length < 100 m
Sheet sizeMax 250 × 500 mm
LaserUV 20 W · spot 20 ± 5 µm
Drill rate300 holes/s @ 100 µm
Min hole50 µm
Weight2500 kg
05

GD 2550B — Dual-Head Cover-Film Reel-to-Sheet

355 nm picosecond · dual-head reel-to-sheet

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GD 2550B — Dual-Head Cover-Film Reel-to-Sheet

Fully-automatic dual-head, dual-platform reel-to-sheet cover-film cutter. Enclosed light path, marble base, and MES-ready control designed for volume FPC / PCB cover-film production.

Applications
  • Cover-film reel-to-sheet volume cutting
  • Electromagnetic-film windowing
  • PI / adhesive film precision cutting
Key advantages
  • Picosecond 355 nm UV source · >30 W @ 500 kHz
  • Dual-head simultaneous processing on two platforms
  • Elevating fume extraction for clean cutting
  • Real-time remote monitoring via MES
Technical specification
ParameterGD 2550B — Dual-Head Cover-Film Reel-to-Sheet
Cutting range250 (X) × 500 (Y) × 2
LaserPicosecond 355 nm · > 30 W @ 500 kHz · < 12 ps
Motion platformMarble · resolution 0.2 µm
Linear / repeat accuracy≤ ± 0.002 mm
Cutting speed500–5000 mm/s
Machine dims1450 × 1130 × 1750 mm
Weight1500 kg
06

Micro SD Card Laser Cutting Machine

Dual-laser dual-platform SD / TF card singulation

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Micro SD Card Laser Cutting Machine

High-power green nanosecond laser platform for fully-automatic Micro SD / TF card singulation with automated loading/unloading and 8-magazine outfeed.

Applications
  • Micro SD / TF card singulation
  • PCB / RF4 hard-board depaneling
Key advantages
  • Dual green nanosecond lasers (35 W each)
  • Precision marble motion platform
  • Machine accuracy ± 0.02 mm
  • Auto load / unload · 30 s cycle
Technical specification
ParameterMicro SD Card Laser Cutting Machine
External dims2250 × 1800 × 1950 mm ± 20 mm
Weight3200 kg
Working area330 × 330 mm
Magazine capacity0–400 pcs · 8 outfeed magazines
Load/unload cycle30 s
Cutting speed500–1500 mm/s
Min hole0.5 mm
07

MicroScan 6500

Large-format UV depaneling for high-mix FPC / PCB

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MicroScan 6500

Large-format UV platform extending the MicroScan family for wider panels, combining galvo scanning with a marble motion base for stable ± 25 µm process accuracy.

Applications
  • Large-format FPC / PCB depaneling
  • Cover-film and PI window opening
  • Multi-layer rigid-flex processing
Key advantages
  • Large working area with fly-scan stitching
  • 5 MP CCD alignment with scaling compensation
  • ScanCutPro control software
  • Fully enclosed light path with fume extraction
Technical specification
ParameterMicroScan 6500
Laser sourceUV 355 nm · ns / ps
Working area600 × 500 mm
Process accuracy± 25 µm · CPK ≥ 1.33
Cutting speed500–5000 mm/s
08

MicroDrill 5250-RTP-A / CVL6000

Roll-to-roll UV drilling & marking

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MicroDrill 5250-RTP-A / CVL6000

Roll-to-roll UV drilling and QR-marking platform for continuous flexible-material production, paired with the CVL6000 vision-linked handling unit for unattended running.

Applications
  • Roll-to-roll micro-drilling on PI / FPC
  • Continuous QR / data-matrix marking
  • Reel-fed flexible circuit processing
Key advantages
  • Continuous reel-to-reel feeding with tension control
  • On-the-fly vision alignment
  • Traceability marking with MES link
  • Unattended production capability
Technical specification
ParameterMicroDrill 5250-RTP-A / CVL6000
Laser sourceUV 355 nm ns
Web width≤ 300 mm
Min hole0.05 mm
Process accuracy± 25 µm
09

MicroScan 3300-DD-GR-A / 3250-A

Green-laser precision cutting for brittle materials

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MicroScan 3300-DD-GR-A / 3250-A

Green (532 nm) laser platforms for brittle and heat-sensitive materials ceramic substrates, sapphire, glass and thin sensor stacks with dual-drive motion for low-stress cutting.

Applications
  • Ceramic substrate and sapphire cutting
  • Glass and filter micro-machining
  • Sensor and fingerprint chip singulation
Key advantages
  • 532 nm green source · low heat-affected zone
  • Dual-drive precision motion platform
  • Vision alignment with auto compensation
  • Chip-free, crack-free edge quality
Technical specification
ParameterMicroScan 3300-DD-GR-A / 3250-A
Laser sourceGreen 532 nm · ns / ps
Working area330 × 330 mm
Process accuracy± 20 µm
Cutting speed500–3000 mm/s

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